Fabrication of P-Well Resonant Tunneling Diode Based on SiGe/Si and Its DC-parameter Extraction

CR Xiong,Y Wang,PY Chen,ZP Yu
DOI: https://doi.org/10.1016/j.mssp.2004.09.016
IF: 4.1
2004-01-01
Materials Science in Semiconductor Processing
Abstract:Resonant tunneling diodes (RTD) are considered as one of the most promising band-gap engineering heterostructure devices for negative differential resistance (NDR) feature in the current–voltage trace. In this letter, a p-well SiGe/Si RTD is proposed and demonstrated. Its I–V relationship is obtained by Keithley 4200 semiconductor parameter analyzer, and NDR feature can be observed obviously at room temperature. The obtained peak current density is 45.92kA/cm2, and peak to valley current ratio (PVCR) is 2.21. Considering the influence of series resistance on the I–V relationship, the DC-parameter of RTD was extracted from the experimental data. This work is helpful to improve the performance of RTD and design of RTD-based circuits.
What problem does this paper attempt to address?