An Analytical Model for Pull-in Voltage of Clamped–clamped Multilayer Beams

H Rong,QA Huang,M Nie,WH Li
DOI: https://doi.org/10.1016/j.sna.2004.03.027
2003-01-01
Journal of Semiconductors
Abstract:This paper develops an analytical model for the deflection of clamped–clamped multilayer beams as a function of applied voltage by the energy method. The normalized displacement of the center of the beams and the pull-in voltage have been obtained, the model is also suitable to clamped–clamped beams with compressive stress. The model results are compared with FEM simulations, provided by the CosolveEM module in Coventorware, showing excellent agreement. This provides an approach of extracting material properties for the multilayer beams.
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