Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

Wavefront Reconstruction Technology Based on Single Interferogram

Interferometry Measurement Of Parallel Optical Plate Wavefront

Study on an Automatic Processing Technique of the Circle Interference Fringe for Fine Interferometry

Wavefront reconstruction for double-grating Ronchi lateral shearing interferometry with nonlinear optimization

Research on Two Optical Methods for Aspheric Measurement

Surface Measurement Methods Based on Single and Multi-Frequency Fringes and Its Applications in Reverse Engineering

Single-Shot White-Light Dispersive Interferometric Profilometer

Aspheric and Free-Form Surfaces Test with Non-Null Sub-Aperture Stitching

Recent Developments of Interferometric Wavefront Sensing

Wavefront reconstruction by means of a new extrapolation method of fringe-prolongation

Wavelet Transform Based Defringing in Interference Imaging Spectrometer

Wavefront Sensing and Surface Shape Measurement Based on Microfocus X-Ray Grating Interferometer

Aspherical Surface Wavefront Testing Based on Multi-Directional Orthogonal Lateral Shearing Interferometry

Stability of Zernike Coefficients Solved by the Covariance Matrix Method in the Analysis of the Wave Front Aberration

A Diagnostic System Toward High-Resolution Measurement of Wavefront Profile

Modal Wavefront Reconstruction in Rotational Shearing Interferometer by Zernike Polynomials

Multiple-surface Interference Fringes Analysis Basing on Wavelength-Modulated Phase Shifting Interferometry

Study on Phase Retrieval of a Single Closed Fringe Interferogram in Radial Shearing Interferometer for Aspheric Test

Research on full-field measurement of optical film thickness by processing double interferometric fringes based on digital wavefront interferometry

An accurate surface topography restoration algorithm for white light

Aspheric Surface Reconstruction for Scanning Interference