Theoretical analysis of Si1¿x¿yGexCy near-infrared photodetectors

Baojun Li,Soo-Jin Chua,Eugene A. Fitzgerald
2003-01-01
Abstract:A near-infrared waveguide photodetector in a Si-based ter- nary Si12x2yGexCy alloy is analyzed theoretically and the simulation re- sults are obtained for 0.85- to 1.06-mm wavelength fiber optic intercon- nection system applications. Two sets of detectors with active absorption layer compositions of Si0.79Ge0.2C0.01 and Si0.70Ge0.28C0.02 are designed. The active absorption layer has a thickness of 120 to 450 nm. The ex- ternal quantum efficiency can reach;3% with a cut-off wavelength of around 1.2 mm. © 2003 Society of Photo-Optical Instrumentation Engineers.
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