Effects of heat treatment on the microstructure of amorphous boron carbide coating deposited on graphite substrates by chemical vapor deposition

siwei li,bin zeng,zude feng,冯祖德,yongsheng liu,wenbin yang,i cheng,litong zhang
DOI: https://doi.org/10.1016/j.tsf.2010.08.099
IF: 2.1
2010-01-01
Thin Solid Films
Abstract:A two-layer boron carbide coating is deposited on a graphite substrate by chemical vapor deposition from a CH4/BCl3/H2 precursor mixture at a low temperature of 950°C and a reduced pressure of 10KPa. Coated substrates are annealed at 1600°C, 1700°C, 1800°C, 1900°C and 2000°C in high purity argon for 2h, respectively. Structural evolution of the coatings is explored by electron microscopy and spectroscopy. Results demonstrate that the as-deposited coating is composed of pyrolytic carbon and amorphous boron carbide. A composition gradient of B and C is induced in each deposition. After annealing, B4C crystallites precipitate out of the amorphous boron carbide and grow to several hundreds nanometers by receiving B and C from boron-doped pyrolytic carbon. Energy-dispersive spectroscopy proves that the crystallization is controlled by element diffusion activated by high temperature annealing, after that a larger concentration gradient of B and C is induced in the coating. Quantified Raman spectrum identifies a graphitization enhancement of pyrolytic carbon. Transmission electron microscopy exhibits an epitaxial growth of B4C at layer/layer interface of the annealed coatings. Mechanism concerning the structural evolution on the basis of the experimental results is proposed.
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