Influence of Gas Flow on Response of Semiconductor Gas Sensor

LIANG Hong-zeng,YU Jun,SUN Chang-yu,TANG Zhen-an
DOI: https://doi.org/10.3969/j.issn.1002-1841.2012.05.001
2012-01-01
Abstract:Semiconductor gas sensors are widely used in the e-nose systems to detect combustible gas.However,semiconductor gas sensors are sensitive to the change of environment around,which has an impact on the recognition precision of the e-nose.This paper studied the influence of gas flow on the response curves and the feature parameters of semiconductor gas sensor by experiments,and the results show that the flow velocity of the gas around the sensors has an influence on both the dynamic response and the steady response of the sensors,increasing the flow velocity,the response time and the recovery time will decrease,the sensitivity will increase and the baseline voltage will decrease,and the flow velocity has different influence on the maximum response value to different sensors.Below 200 sccm,the variation of flux has relatively large influence on the response of the sensors,while above 500 sccm,the influence is small.
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