Abstract:During an ultrashort laser pulse, numerous photons are emitted in a very short period of time leading to very high peak power. The photons can excite free electrons in the material to very high temperatures (heating) or strip bound electrons from the atoms (ionization). In ultrashort laser heating there is a time lag between the electron heating and the lattice heating. The two-temperature model has been proposed to calculate the electron temperature and the lattice temperature and the related damage threshold for metals. On the other hand, ablation models based on impact ionization and photoionization have been proposed to predict material removal rates for semiconductors and dielectrics. However, in existing heating or ablation models, some critical thermal and optical properties of the material are assumed to be time, space, and fluence independent or the estimations are limited to temperatures much lower than the Fermi temperature. In this paper, the quantum theories are employed to calculate the free electron heating, free electron relaxation time, and the temporal and spatial dependent thermal and optical material properties. The improved two-temperature model is used to predict damage fluences of gold thin films. The new ablation model based on the Fokker-Planck equation can predict ablation depth and crater shape of semiconductors and dielectrics. The predicted results are in good agreement with experimental data.

Prediction of Crater Shape in Femtosecond Laser Ablation of Dielectrics

Predication of Ablation Depth and Crater Shape in Femtosecond Laser Micromachining of Wide Bandgap Materials

Plasma Modeling for Ultrashort Pulse Laser Ablation of Dielectrics

A Plasma Model with Quantum Treatments for Femtosecond Laser Ablation of Glasses

Ablation shape determination under ultrafast laser pulse irradiation

Energy Transport and Material Removal in Wide Bandgap Materials by A Femtosecond Laser Pulse

A Prediction Model for Ablation Fluence Threshold in Femtosecond Laser Processing of Fused Silica

A Plasma Model Combined with an Improved Two-Temperature Equation for Ultrafast Laser Ablation of Dielectrics

Materials Removals During Femtosecond Laser Non-Thermal Ablation of Dielectrics

Ultrafast Photon-Electron Interactions in Dielectrics by a Single Laser Pulse

Ultra-short Laser Ablation of Dielectrics: Theoretical Analysis of Threshold Damage Fluence and Ablation Depth

Study of Femtosecond Ablation on Aluminum Film with 3D Two-Temperature Model and Experimental Verifications

Modeling the Femtosecond Laser Pulse-Train Ablation of Dielectrics

Adjustments of Dielectrics Craters and Their Surfaces by Ultrafast Laser Pulse Train Based on Localized Electron Dynamics Control

A Model to Predict the Ablation Width and Calculate the Ablation Threshold of Femtosecond Laser

Phenomenological Modeling for Femtosecond Laser Processing of Fused Silica

Investigations of Femtosecond-Nanosecond Dual-Beam Laser Ablation of Dielectrics.

Efficient modeling of metal ablation irradiated by femtosecond laser via simplified two-temperature model coupling molecular dynamics

Fundamentals of Energy Cascade During Ultrashort Laser-Material Interactions (invited Paper)

A Novel Laser-Accumulated Plasma Model with an Effective Beam Profile Based on Experiments with Mj-Level Femtosecond Pulses Targeting for Analysis of the Ablation Thresholds and Ablated Channel Widths on Fused Silica Surfaces

Surface Evolution in Ultrafast Laser Ablation of Fused Silica