High-Density Read-Only Memory Disc with Ag 11 in 12 Sb 51 Te 26 Super-Resolution Mask Layer

F Zhang,Y Wang,WD Xu,HR Shi,JS Wei,FX Gan
DOI: https://doi.org/10.1088/0256-307x/21/10/030
2004-01-01
Chinese Physics Letters
Abstract:A novel read-only memory (ROM) disc with an Ag(11)Iu(12)Sb(51)Te(26) super-resolution mask layer is proposed and investigated for the first time to our knowledge. The carrier-to-noise ratio of more than 40 dB could be obtained from small pits (380 nm), which are below the readout resolution limit (400 nm), in our dynamic setup with a wavelength of 632.8 nm and numerical aperture of 0.40. Dependences of carrier-to-noise ratio on readout power, readout velocity and film thickness are studied. The results show that the optimum film thickness is 20-50 nm and the corresponding carrier- to-noise ratio is more than 40 dB at readout power of 4 mW and readout velocity of 2 m/s in our experiment. The super-resolution readout mechanism for this ROM disc is also discussed.
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