Abstract:We present deposition and characterization of multilayers consisting of 20 repetitions of 15 $\r{A}$ thick permalloy Ni$_{80}$Fe$_{20}$ at. \% (Py) and 5 $\r{A}$ Pt. The samples were prepared by two different sputter deposition methods, namely dc magnetron sputtering (dcMS) and high power impulse magnetron sputtering (HiPIMS), that represent low and moderate ionized flux fraction of the film forming material, respectively, for deposition of the Py layers. The effect of substrate roughness, working gas pressure and sputter power on the in-plane uniaxial magnetic anisotropy of the films are studied. The multilayers were characterized by X-ray reflectivity and diffraction, and by magneto-optical Kerr effect (MOKE). It is shown that HiPIMS deposition produces multilayers with unique surface roughness regardless of the substrate surface roughness. Multilayers prepared by both dcMS and HiPIMS deposition present a strong (111) texture normal to the film plane. The results show that utilizing HiPIMS for deposition of the Py layer leads to a minimum interface mixing between individual layers compared to dcMS deposition performed at sputter power. This is associated with the smooth surface of Py deposited by HiPIMS. However, this sharp interface results in higher coercivity and an opening in the hard axis hysteresis loops while multilayers with intermixing present well defined in-plane uniaxial anisotropy i.e. a linear hard axis. Comparison with Py/Cu and Py/CuPt multilayers, prepared under identical conditions using HiPIMS, suggests that poor in-plane uniaxial anisotropy is obtained in the Py/Pt case, caused by the inverse magnetostriction arising from the large lattice mismatch between Py and Pt. The Py/Pt multilayers that exhibit interface mixing have a more relaxed interface and thus presents negligible inverse magnetostriction and have better defined anisotropy.

Tailoring High-Frequency Properties of Permalloy Films by Submicrometer Patterning

Permalloy–FeMn Exchange-Biased Multilayers Grown on Flexible Substrates for Microwave Applications

Ferromagnetic Resonance Frequency Tuning of Fetan Thin Films by Strips Patterning with Angular Displacements

Tailoring interface mixing and magnetic properties in (111) Permalloy/Pt multilayers

Enhancement of Exchange Bias and Ferromagnetic Resonance Frequency by Using Multilayer Antidot Arrays

Tuning the ferromagnetic resonance frequency of microstructured permalloy film on flexible substrate

Plasma Dry Etched P-Silicon Micromolds for Permalloy Microstructure Array Electrodeposition

Ghz Microwave Permeability of Cofezr Amorphous Materials Synthesized by Two-Step Mechanical Alloying

Tailoring Sample-Wide Pseudo-Magnetic Fields on a Graphene–black Phosphorus Heterostructure

Heterointerface Construction for Permalloy Microparticles through the Surface Modification of Bilayer Metallic Organic Frameworks: Toward Microwave Absorption Enhancement

Perpendicular magnetic anisotropy in permalloy ultrathin film grown on RuO2(101) surface

Magnetic Force Microscopy Study of Electron-Beam-patterned Soft Permalloy Particles: Technique and Magnetization Behavior

Enhancement the perpendicular magnetic anisotropy of nanopatterned hard/soft bilayer magnetic antidot arrays for spintronic application

TEM sample preparation of lithographically patterned permalloy nanostructures on silicon nitride membranes

Characterization of spin pumping effect in Permalloy/Cu/Pt microfabricated lateral devices

A Novel Fabrication and Properties Investigation of Permalloy-SiO2 Granular Films with Induced Anisotropy

Shape critical properties of patterned Permalloy thin films

Effect of disorder studied with ferromagnetic resonance for arrays of tangentially magnetized sub-micron Permalloy discs fabricated by nanosphere lithography

Analysis of Relationship between Microwave Magnetic Properties and Magnetic Structure of Permalloy Films

Magnetization Reversal and Configurational Anisotropy of Dense Permalloy Dot Arrays

Fabrication and Characterization of Silicon on Permalloy Film