Effect of Heat Treatment on Structure and Magnetic Properties of the FeN and FeTiN Alloys Films

DL Peng,K Sumiyama,K Suzuki
DOI: https://doi.org/10.1016/s0925-8388(97)00049-2
IF: 6.2
1997-01-01
Journal of Alloys and Compounds
Abstract:FeN and FeTiN alloy films have been prepared by reactive sputtering. The structure and magnetic properties of the FeTiN and FeN films have been studied as a function of the N2 flow rate R(N2) and annealing temperature TA by X-ray diffraction (XRD) and a vibrating sample magnetometer. The as-prepared and annealed FeN films consist of the α-Fe and Fe4N phases but the FeTiN films are composed of the α-Fe and Ti2N phases. The coercivity, Hc, of the FeN films changes drastically with R(N2) and TA, while that of the FeTiN films does not change with TA up to 500°C. These results indicate that the addition of Ti suppresses the formation of iron nitride phases and improves the thermal stability of FeN films.
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