Design and optimization of surface stress-based capacitive membrane biosensor

SHI Qiang,SANG Shengbo,FENG Hui,ZHAO Yuan
DOI: https://doi.org/10.3969/j.issn.1001-2028.2013.10.017
2013-01-01
Abstract:Based on summarizing the deficiency of conventional surface stress-based micro-cantilever biosensor,a novel surface stress-based capacitive polydimethylsiloxane(PDMS) micro-membrane biosensor was proposed.The structure principles and the advantages of this biosensor were analyzed.In addition,a 3-D finite element simulation model was built in ANSYS.Meanwhile,the membrane deformations with different sizes of Au electrodes under certain surface stress were simulated,and the corresponding outputs of capacitance were calculated.The simulation results show that both the membrane's deformation and variation of capacitance are largely depend on the coverage of Au on PDMS membrane.The optimized structure can be obtained based on the relationship between capacitance variation and membrane deformation.
What problem does this paper attempt to address?