Nano-welding and Nano-Cutting with an Electron Beam

XU Sheng-yong
DOI: https://doi.org/10.3969/j.issn.1000-6281.2007.06.008
2007-01-01
Abstract:A high-intensity electron beam with a intensity of 106 A/cm2 has been applied to create holes,gaps,and other patterns of atomic and nanometer dimensions on a single semiconducting nanowire or a metallic nanowire.An electron beam with slightly weaker intensity can be used to weld individual nanowires,forming metal-to-metal or metal-to-semiconductor nanowire junctions.These applications of an intense electron beam result from various inelastic scattering processes between an incident high-energy electron and atoms of the specimen,that create heating,amorphization,ablation effects of the specimen,and some nonlinear effects such as plasma formation at the specimen surface.The localized,impurity-free electron beam nano-welding and nano-cutting techniques are ready for fabrication of nanodevices,and have a potential for large scale application.
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