Abstract:This work presents our recent research and development of environment-friendly MEMS fabrication technology based on an eco-friendly silicon deep reactive ion etching (D-RIE), and polymer-MEMS utilizing hot embossing process. In order to show the capability of this ‘Green’ fabrication technology, several typical MEMS devices have been fabricated successfully. Regarding silicon dry etching technology, the often-used gas SF6 which has very high Global Warming Potentials (GWP) should be replaced by other lower GWP gases, such as Ar/F2. First, the gases were selected with consideration of the simple handle and less danger. Then, Si etching experiments corresponding to these gases were performed and analyzed systematically to find out the most suitable process which can reduce or replace SF6 gas. Furthermore, the etching rate improvement was also studied based on process’s real-time monitoring and feed-back control technology to optimize the timing of deposition and etching steps (Bosch process); therefore, bias RF power can be smartly controlled during the process. In polymer-MEMS technology, we have developed a novel fabrication of a monolithic PMMA MEMS devices utilizing hot embossing, surface-activated direct bonding, polishing, and elliptical vibration cutting processes. The robustness and capability of the method are demonstrated through the fabrication of sophisticated PMMA freestanding micro structures and devices. An efficient technique using reinforcement material to protect the PMMA microstructures during release process was proposed. Small Young’s modulus and high thermal expansion of polymer are the advantages for electrostatic and thermal actuators, respectively, because it will require less power than silicon counterparts to produce the same displacement. All PMMA acceleration sensor, actuators and mirror device have been fabricated to shows the advantages of polymer-MEMS technology. Fig. 1 shows typical MEMS devices made of PMMA polymer by using our polymer-MEMS fabrication process.

Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication

Development of polymer MEMS process technology as an approach to a sustainable production system

Three Dimensional Molecular Dynamics Simulation of Nano-Lithography Process for Fabrication of Nanocomponents in Micro Electro Mechanical Systems (MEMS) Applications

Emerging Technologies of Micro-Nanoelectromechanical Systems(mems/nems)

Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System

Standing Surface Acoustic Wave-Assisted Fabrication of Region-Selective Microstructures Via User-Defined Waveguides.

Soft chemistry assisted On-chip Integration of Nanostructured quartz-based Piezoelectric Microelectromechanical System

Microdevice Array Design and Fabrication in Monolithic MEMS SoC

A Flip-Chip Assembled Microplatform For Hybrid Mems

Study on Compatible Cmos-Mems Process with Surface Micromachining for the Application of Monolithic Integration

CMOS MEMS: A Key Technology Towards the &#x201c;more Than Moore&#x201D; Era

Leveraging of MEMS Technologies for Optical Metamaterials Applications

Environment Friendly MEMS Process

Two-step MEMS microfabrication via 3D direct laser lithography

A hybrid polymer/ceramic/semiconductor fabrication platform for high-sensitivity fluid-compatible MEMS devices with sealed integrated electronics

The key technologies in silicon based microwave and RF MEMS device fabrication

Design and fabrication of MEMS devices using the integration of MUMPs, trench-refilled molding, DRIE and bulk silicon etching processes

Microelectromechanical systems (MEMS): fabrication, design and applications

Polymer‐Reinforced, Aligned Multiwalled Carbon Nanotube Composites for Microelectromechanical Systems Applications

Ferroelectric Thin Films in Micro-electromechanical Systems Applications

A Novel Fabrication Process of MEMS Devices on Polyimide Flexible Substrates