Study on the Adhesion Strength Between Epoxy Molding Compound and Leadframes Modified by PⅢ Technology

Liu Lilong,Zhang Xin,Lu Qian,Zhou Qianfei,Wu Xiaojing
DOI: https://doi.org/10.3969/j.issn.1003-353x.2011.06.005
2011-01-01
Abstract:Using O2,N2,CO and CO2 as the source gases,the Cu leadframes pre-plated with nickel were modified by plasma immersion ion implantation(PⅢ) technique.The pull test shows that comparing with leadframes without treatment,the adhesion strength between the leadframe and epoxy molding compound(EMC) increases about 35 and 12 times after CO and CO2 plasma implantation,respectively.While after O2 and N2 plasma implantation,the adhesion strength does not change at all.The scanning electron microscope(SEM) was used to observe the morphology of the leadframe surface.It is found that the surface roughness does not change seriously after PIII treatment.X-ray photoelectron spectroscopy(XPS) analysis shows that after CO or CO2 plasma implantation,the carbonyl appeares on leadframes surface.Based on these analysis results,the mechanism of adhesion enhancement was discussed.
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