Recent progress on silion photonics in GFP2011

CHEN Yuan-yuan,YU Jin-zhong
DOI: https://doi.org/10.3969/j.issn.1001-5078.2012.09.001
2012-01-01
Abstract:Semiconductor silicon is a kind of electron material,and is also a kind of appropriate photon material.Mature micro-electronics processes provide solid foundation for silicon photonics.The recent progress of Si-based optical waveguide technology especially the SOI(silicon-on-insulater)technology reported on GFP2011 has been overviewed.The modulator,subwavelength grating,hybrid integration,packaging and waveguide new process are introduced in detail.
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