Effects of Dielectric Overlay Upon Surface Acoustic Wave Propagation under Metallic Grating Structure

S Kondo,T Omori,K Hashimoto,M Yamaguchi
DOI: https://doi.org/10.1143/jjap.40.3759
IF: 1.5
2001-01-01
Japanese Journal of Applied Physics
Abstract:This paper describes surface acoustic wave (SAW) propagation under a periodic metallic grating structure overlaid with an SiO2 film. An analysis was made by modifying the software FEMSDA, in which the finite element method is applied to both the grating electrodes and SiO2 overlay. For Rayleigh-type SAW propagating on 128°YX-LiNbO3, changes in the reflection coefficient and effective velocity are calculated as a function of the SiO2 film thickness overlaying an Al grating structure. It is shown that the SiO2 film overlaying the top surface of the grating electrodes affects both the SAW reflection coefficient and effective SAW velocity more significantly than the film overlaying the electrode gaps.
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