Influence of Coupling with SH SAW on Lateral Propagation of Rayleigh SAW on 128 ° YX-LiNbO 3 128 oYX-LiNbO

Benfeng Zhang,Tao Han,Qiaozhen Zhang,Gongbin Tang,Tatsuya Omori,Ken-ya Hashimoto

2016-01-01

Abstract:Recently, the Rayleigh surface acoustic wave (SAW) on 128°YX-LiNbO3 (128-LN) is paid much attention for realization of high performance temperature compensated (TC) SAW devices1). It is known that the shear horizontal (SH) SAW also exists on the substrate, and proper adjustment of the rotation angle  enables to make its electromechanical coupling factor K2 zero2). However, in grating structures, the mechanical coupling between the SH and Rayleigh SAWs occurs and causes undesirable impacts on device performances3,4). This paper discusses impact of the mechanical coupling with the SH SAW on the propagation of the Rayleigh SAW on 128-LN. The thin plate model proposed by the authors’ group5),6) is applied for the analysis of lateral propagation and resonance characteristics. It is shown that the model can describe lateral propagation of Rayleigh SAW well.