Band 40/41 Surface Acoustic Wave Filters on 42°YX-Lithium Tantalate Substrate with Suppression of Transverse Leakage
Qiang Xiao,Zihang Gao,Mengqun Chu,Zeyu Zheng,Xuesong Du,Chengji Hu,Hongzhi Pan,Hualin Li,Jiahe Dong,Zhenglin Chen,Huazhi Chen,Chuan Lu,Mi Tang,Yanping Fan,Jinyi Ma
DOI: https://doi.org/10.3390/mi15050585
IF: 3.4
2024-04-29
Micromachines
Abstract:The transverse leakage of leaky surface acoustic waves (LSAWs) occurs on 42°YX-lithium tantalate substrates (42LT), which increases the insertion loss, narrows the bandwidth and flattens the roll-off of band 40/41 SAW filters and duplexers. In this work, LSAW characteristics with different metal materials and thicknesses are calculated by the finite element method (FEM), which determines the IDT material and thickness used for band 40/41 SAW filter design. To deeply understand transverse leakage and suppress it, the effects of different gap and dummy lengths on transverse leakage are simulated and discussed. Then, a new technique of using a wider dummy without any additional lithographic or depositing processes is proposed to suppress the leakage. Its effectiveness is validated by both simulations and experiments. Then, the technique is extended to applications of band 40 and 41 SAW filters. The experimental results show that with the wider dummy structure, the band 40 and 41 SAW filters achieve a more than 0.2 dB improvement in the insertion loss, a wider bandwidth and a steeper roll-off characteristic. This technique may also be extended to the other band SAW filter applications.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied