Micro-Opto-Mechanical Grating Switches

AQ Liu,B Zhao,F Chollet,Q Zou,A Asundi,H Fujita
DOI: https://doi.org/10.1016/s0924-4247(00)00404-0
2000-01-01
Abstract:This paper reports the design, fabrication, and testing of a Micro-opto-mechanical grating switch driven by electrostatic actuator for fiber-optic communication applications. It consists of two bounded silicon wafers. One input fiber with a hemispherical lens at its end and three photodetectors are mounted on the upper wafer. A movable platform with two gratings and one mirror are fabricated on the lower wafer. When the movable platform is at a certain position, the input beam can be split into three beams by the gratings. The reflectivity of the mirror is about 85% while the efficiency in the three different order is 29%, 26%, and 26%. The switching speed is about 500 μs. Details of the grating switching design, theoretical analysis, fabrication and experimental results are presented in this paper.
What problem does this paper attempt to address?