Research on In2O3 Based NO2 Sensors

Feng-min LIU,Li-hua CHEN,Bao-fu QUAN
DOI: https://doi.org/10.3969/j.issn.1671-4776.2007.07.098
2007-01-01
Abstract:The In2O3 powder was prepared by chemical precipitation method.The crystal structure and nano scale particle size of the In2O3 powder were determined by X ray diffraction(XRD) analysis.The gas sensing properties of the sintered adjacent thermal sensors based on In2O3 powder were modified through a solid-phase doping method.When operating temperature is lower than 100 ℃ and SO2,CO,CH4,Cl2 and NO2 gases were tested,it is found that both elements with 2% PdCl2 and with 5% CeO2 doping are very sensitive to NO2 gas and the selectivity of the element is excellent because the sensitivity to SO2,CO,CH4 and Cl2 gases are very low.
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