Abstract:The soft X-ray Mach-Zehnder interferometer is an important tool in measuring the electron densities of laser-produced plasma near the critical surface.The design,fabrication and characterization of multilayer beam splitters at 13.9 nm for soft X-ray Mach-Zehnder interferometer are presented in the paper.The design of beam splitter is completed based on the standard of maximizing product of reflectivity and transmission of the beam splitter at 13.9 nm.The beam splitters,which are Mo/Si multilayer deposited on 10 mm×10 mm area,100 nm thickness Si_3N_4 membranes,are fabricated using the magnetron sputtering.A method based on extended He-Ne laser beam is developed to analyze the figure error of the beam splitters.The data measured by an optical profiler prove that the method based on visible light is effective to analyze the figure of the beam splitters.The rms figure error of a beam splitter reaches 1.757 nm in the center area 3.82 mm×3.46 mm and satisfies the need of soft X-ray interference experiment.The product of reflectivity and transmission measured by synchrotron radiation is near to 4%.The Mach-Zehnder interferometer at 13.9 nm based on the multilayer beam splitters is used in 13.9 nm soft X-ray laser interference experiment,in which a clear interferogram of C_8H_8 laser-produced plasma is got.

Multilayer Beam Splitter Used in a Soft X-ray Mach-Zehnder Interferometer at Working Wavelength of 13.9 Nm

DESIGN AND FABRICATION OF VISIBLE+1.54μm LASER/LONGWAVE INFRARED DICHROIC BEAMSPLITTER

Design and Preparation of Multilayer Dielectric Beam Splitter for Division-of-Amplitude Photopolarimeter at 1064 nm

Design and Fabrication of Short-Wave /Long-Wave Infrared Dichroic Beam Splitter

Compact 1 X 3 Waveguide Beam Splitters with Variable Splitting Ratios in LiNbO3 Crystal Fabricated by Femtosecond Laser Direct Writing

A Binary Beam-Splitter For Lidar Beam-Shaping In Laser Imaging Application - Art. No. 66241j

Fabrication of A Multimode-Interference-Based Multimode Power Splitter in Glass

An Asymmetrical Sinx-Based Polarization Beam Splitter at 810 Nm

Broadband and High Uniformity Y Junction Optical Beam Splitter with Multimode Tapered Branch

Design of Broadband and Wide-angle Non-polarization Beamsplitter

Particle Swarm Optimized Polarization Beam Splitter Using Metasurface-Assisted Silicon Nitride Y-junction for Mid-Infrared Wavelengths

Numerical Investigation of a Short Polarization Beam Splitter Based on Dual-Core Photonic Crystal Fiber with As2S3 Layer

Broadband, Optically Transparent And Highly Flexible Multispectral Beam Splitter Based On Ag Nanowires/Graphene Composite Film For Hybrid Optical Systems

The fabrication of a 25x25 multiple beam splitter

Mid-Infrared, Ultra-Broadband, Low-Loss, Compact Arbitrary Power Splitter Based on Adiabatic Mode Evolution

Compact Polarization Beam Splitter Using an Asymmetrical Mach–Zehnder Interferometer Based on Silicon-on-Insulator Waveguides

Multimode Interference Optical Power Splitter in Proton-Exchange LiNbO3 Waveguides

3D Simulation of Low Loss Photonic Crystal-Based Splitters on Lithium Niobate in Mach-Zehnder Interferometer

60.5 Db Silicon Mach-Zehnder Interferometer Using Self-Optimising Beam-Splitters

Self-collimating polarization beam splitter based on photonic crystal Mach–Zehnder interferometer

Ion Beam Sputter Depositing Harmonic Beam Splitter by Time-power Monitoring Method