Abstract:Silicon photonic Mach-Zehnder switches (MZSs) have been extensively investigated as a promising candidate for optical systems. However, conventional 2 x 2 MZSs are usually prone to the size variations of the arm waveguides due to imperfect fabrication, resulting in considerable random phase imbalance between the two arms, thereby imposing significant challenges for further developing next-generation N x N MZSs. Here we propose a novel design toward calibration-free 2 x 2 and N x N MZSs, employing optimally widened arm waveguides, enabled by novel compact tapered Euler S-bends with incorporated mode filters. With standard 180 nm CMOS foundry processes, more than thirty 2 x 2 MZSs and one 4 x 4 Benes MZS with the new design are fabricated and characterized. Compared with their conventional counterparts with 0.45-mu m-wide arm waveguides, the present 2 x 2 MZSs exhibit significant reduction in the random phase imbalance. The measured extinction ratios of the present 2 x 2 and 4 x 4 MZSs operating in the all-cross state are 27-49 dB and similar to 20 dB across the wavelength range of similar to 60 nm, respectively, even without any calibrations. This work paves the way toward calibration-free large-scale N x N MZSs for next-generation silicon photonics. (C) 2022 Chinese Laser Press

60.5 Db Silicon Mach-Zehnder Interferometer Using Self-Optimising Beam-Splitters

60 Db High-Extinction Auto-Configured Mach-Zehnder Interferometer

Mach-Zehnder Interferometers Assembled with Optical Microfibers or Nanofibers

High-Baudrate Silicon Photonics Ring Resonator and Mach-Zehnder Modulators for Short-Reach Applications

Highly Efficient Silicon Michelson Interferometer Modulators

Mach-Zehnder interferometer using frequency-domain beamsplitter

Silicon Dual-Series Mach-Zehnder Modulator with High Linearity

Compact Polarization Beam Splitter Using an Asymmetrical Mach–Zehnder Interferometer Based on Silicon-on-Insulator Waveguides

Silicon-Based MZI-Embedded Microring Array with Hitless and FSR-Alignment-Free Wavelength Selection

On-Chip High Extinction Ratio Single-Stage Mach-Zehnder Interferometer Based on Multimode Interferometer

A high linear silicon Mach-Zehnder modulator by the dual-series architecture

Toward calibration-free Mach-Zehnder switches for next-generation silicon photonics

Silicon nitride thermo-optic on-chip Mach-Zehnder interferometer at visible wavelengths

Improved Mach-Zehnder Interferometer With Micro-Ring-Resonator-Based Two-Beam Interferometer

A Silicon Optical Single Sideband Modulator with Ultra-High Sideband Suppression Ratio

Highly linear silicon Mach-Zehnder modulators with optimized phase-shifter

Photothermal Switching Based on Silicon Mach–Zehnder Interferometer Integrated with Light Absorber

High-speed, low-loss silicon Mach-Zehnder modulators with doping optimization.

Athermal and tunable echelle grating wavelength demultiplexers using a Mach-Zehnder interferometer launch structure

Towards calibration-free Mach-Zehnder switches on silicon

Considerations for the Design of Asymmetrical Mach–Zehnder Interferometers Used as Polarization Beam Splitters on a Submicrometer Silicon-On-Insulator Platform