Research on the Key Technology of Micro/nano Machining and Measuring

GUO Yin-biao,WANG Zhen-zhong,PENG Yun-feng,YANG Wei,BI Guo
2011-01-01
Abstract:Ultra precision grinding with diamond wheel is widely used for manufacture of large scale optical lens,especially for batch processing,as the key technology of micro/nano machining and measuring.This paper presents the technical system of micro/nano machining and measuring for large-scale optical manufacture,and introduces the studies of the research team in Xiamen University in the field of advanced optical machining,precision machine tool,micro/nano measuring,fast controllable polishing,machining environment monitoring,and textured surface fabricating.
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