Investigation of Diamond-like Carbon Films Synthesized by Plasma Gun at an Atmospheric Pressure

Tang Wen-jie,Zhang Yue-fei,Chen Qiang,Ge Yuan-jing
DOI: https://doi.org/10.3969/j.issn.1001-3563.2006.05.012
2006-01-01
Abstract:Diamond-Like Carbon(DLC) films were deposited by a DBD plasma gun at an atmospheric pressure,with CH_4 as a precursor and Ar as dilution gas.The effects of DLC film properties from such as the shape of the electrode,site of CH_4 injection,the pretreatment of the substrate and the distance between nozzle and substrate were carried out during DLC film deposition.FTIR were employed to characterize the DLC films and the profilmeter was used to measure the deposition rate.The friction characteristic was also measured.
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