Dielectric Properties of Pb<sub>1-x</sub>Ba<sub>x</sub>ZrO<sub>3</sub> Thin Films with Higher Barium Content

Xi Hong Hao,Ji Wei Zhai
DOI: https://doi.org/10.4028/www.scientific.net/KEM.421-422.119
2010-01-01
Key Engineering Materials
Abstract:The dc bias and temperature dependence of dielectric properties of Pb(1-x)Ba(x)ZrO(3) (PBZ) thin films with higher x (x=0.6, 0.7, 0.8 and 1) were investigated in detail. The results indicated that Pb(0.4)Ba(0.6)ZrO(3) films possessed a moderate tunability of 32.3% and a higher figure of merit of 53.8, which were measured at 100 kHz and at room temperature. Moreover, Pb(0.4)Ba(0.6)ZrO(3) films exhibited a smaller temperature coefficient of capacitance TCC(-20.90)= -1390 ppm/degrees C.
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