Investigation Of Biaxial Elastic Modulus And Cte Of Batio3 Films

GUI-FANG HUANG,WEI-QING HUANG,LING-LING WANG,ZHONG XIE,BING-SUO ZOU,JIAN-HUI ZHANG
DOI: https://doi.org/10.1142/S021797920903876X
2009-01-01
International Journal of Modern Physics B
Abstract:To develop high-quality film device with good reliability, it is often essential to be able to evaluate the parameters such as stress, the biaxial elastic modulus, and coefficient of thermal expansion (CTE) of film. Based on the stress measurement in situ during the thermal cycle by laser scanning method, two techniques were used to measure the biaxial elastic modulus and CTE of BaTio(3) films deposited on substrate. The value of the biaxial elastic modulus and CTE for BaTiO3 films determined from two methods is close, in which the biaxial elastic modulus of BaTiO3 films is higher than that of corresponding bulk while the CTE of BaTiO3 films is a little smaller than that of bulk material.
What problem does this paper attempt to address?