A Signal Detecting Method for the Double Capacitive Output Micromachined Gyroscope

MO Bing,LIU Xiao-wei,TAN Xiao-yun,YIN Liang,DING Xue-wei,TANG Jia-yu
DOI: https://doi.org/10.3969/j.issn.1004-1699.2006.05.245
2006-01-01
Abstract:The structure of the double capacitive output micromachined gyroscope is investigated. The limitation of the traditional signal detecting methods for such gyroscope is analyzed. Based on these, a novel signal detecting method is presented. It enables the common node of the two groups of capacitors to connect to the zero voltage, so that the restriction of the driving force is eliminated and the sensitivity of the gyroscope is increased. This method also supports cancellation of DC voltage mismatch and offset voltage. This method is confirmed by the HSPICE simulation.
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