Low Temperature Plasma Equipment System Based on CAN bus

WANG Jia-le,CHENG Jian,LIU Yi,SANG Qing-shuang
DOI: https://doi.org/10.3969/j.issn.1002-1841.2012.01.018
2012-01-01
Abstract:The modern measurement and control technology based on CAN bus can improve the real-time,reliability and scalability of the low temperature plasma equipment automatic controlling.For a typical low temperature plasma equipment experimental platform,a CAN-bus based measurement and control system was established through self-developed smart nodes and a personal computer with a CAN interface card.The two key problems which impact the real time of the system was discussed.The results of experiment shows the system can work stably and reliably,and the important parameters can be controlled stably.The amount of vacuum fluctuations is 9 Pa,when driving frequency is from 20 Hz to 60 Hz.
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