Abstract:Large-area micropore arrays with a high porosity are in high demand because of their promising potential in liquid biopsy with a large volume of clinical sample. However, a micropore array with a large area and a high porosity faces a serious mechanical strength challenge. The filtration membrane may undergo large deformation at a high filtration throughput, which will decrease its size separation accuracy. In this work, a keyhole-free Parylene molding process has been developed to prepare a large (>20 mm × 20 mm) filtration membrane containing a 2.5-dimensional (2.5D) micropore array with an ultra-high porosity (up to 91.37% with designed pore diameter/space of 100 μm/4 μm). The notation 2.5D indicates that the large area and the relatively small thickness (approximately 10 μm) of the fabricated membranes represent 2D properties, while the large thickness-to-width ratio (10 μm/ < 4 μm) of the spaces between the adjacent pores corresponds to a local 3D feature. The large area and high porosity of the micropore array achieved filtration with a throughput up to 180 mL/min (PBS solution) simply driven by gravity. Meanwhile, the high mechanical strength, benefiting from the 2.5D structure of the micropore array, ensured a negligible pore size variation during the high-throughput filtration, thereby enabling high size resolution separation, which was proven by single-layer and multi-layer filtrations for particle separation. Furthermore, as a preliminary demonstration, the prepared 2.5-dimensional Parylene C micropore array was implemented as an efficient filter for rare cancer cell separation from a large volume, approximately 10 cells in 10 mL PBS and undiluted urine, with high recovery rates of 87 ± 13% and 56 ± 13%, respectively.

Massively-parallel Ultra-High-aspect-ratio Nanochannels As Mesoporous Membranes.

FABRICATION OF MASSIVELY-PARALLEL REGULAR NANOFILTERS FOR HIGH- THROUGHPUT BIOMOLECULE SEPARATION

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Mesoporous Silica Thin Membranes with Large Vertical Mesochannels for Nanosize-Based Separation.

Nanofluidic Molecular Filters for Efficient Protein Separation and Preconcentration

Fabrication of Micro/Nano-filter by building sacrificial structure with colloid crystal

Fabrication of Nanoporous Alumina Ultrafiltration Membrane with Tunable Pore Size Using Block Copolymer Templates

Continuous-Flow Bioseparation Using Microfabricated Anisotropic Nanofluidic Sieving Structures

High-resolution Separation of DNA/proteins Through Nanorod Sieving Matrix.

Direct Fabrication of Freestanding and Patterned Nanoporous Junctions in a 3D Micro-Nanofluidic Device for Ion-Selective Transport

Large‐Area Fabrication of Ultrathin Metal‐Organic Framework Membranes

Micro-patternable Nanoporous Polymer Integrated with Microstructures for Molecular Filtration.

Wafer-scale Fabrication of High-Aspect Ratio Nanochannels Based on Edge-Lithography Technique.

2.5-Dimensional Parylene C Micropore Array with a Large Area and a High Porosity for High-Throughput Particle and Cell Separation

Large-area Graphene-Nanomesh/carbon-nanotube Hybrid Membranes for Ionic and Molecular Nanofiltration

Sub-8 nm networked cage nanofilm with tunable nanofluidic channels for adaptive sieving

Integration of 2D Nanoporous Membranes in Microfluidic Devices

Ultrathin Silica Membranes with Highly Ordered and Perpendicular Nanochannels for Precise and Fast Molecular Separation

Monolithic Fabrication of NPN/SiNx Dual Membrane Cavity for Nanopore-based DNA Sensing

Pervaporation-assisted in situ formation of nanoporous microchannels with various material and structural properties

Two-dimensional carbon nanomesh membrane for ultrafast molecular sieving