Abstract:Large-area micropore arrays with a high porosity are in high demand because of their promising potential in liquid biopsy with a large volume of clinical sample. However, a micropore array with a large area and a high porosity faces a serious mechanical strength challenge. The filtration membrane may undergo large deformation at a high filtration throughput, which will decrease its size separation accuracy. In this work, a keyhole-free Parylene molding process has been developed to prepare a large (>20 mm × 20 mm) filtration membrane containing a 2.5-dimensional (2.5D) micropore array with an ultra-high porosity (up to 91.37% with designed pore diameter/space of 100 μm/4 μm). The notation 2.5D indicates that the large area and the relatively small thickness (approximately 10 μm) of the fabricated membranes represent 2D properties, while the large thickness-to-width ratio (10 μm/ < 4 μm) of the spaces between the adjacent pores corresponds to a local 3D feature. The large area and high porosity of the micropore array achieved filtration with a throughput up to 180 mL/min (PBS solution) simply driven by gravity. Meanwhile, the high mechanical strength, benefiting from the 2.5D structure of the micropore array, ensured a negligible pore size variation during the high-throughput filtration, thereby enabling high size resolution separation, which was proven by single-layer and multi-layer filtrations for particle separation. Furthermore, as a preliminary demonstration, the prepared 2.5-dimensional Parylene C micropore array was implemented as an efficient filter for rare cancer cell separation from a large volume, approximately 10 cells in 10 mL PBS and undiluted urine, with high recovery rates of 87 ± 13% and 56 ± 13%, respectively.

FABRICATION OF MASSIVELY-PARALLEL REGULAR NANOFILTERS FOR HIGH- THROUGHPUT BIOMOLECULE SEPARATION

Massively-parallel Ultra-High-aspect-ratio Nanochannels As Mesoporous Membranes.

Simple and Cost-Effective Fabrication of Two-Dimensional Plastic Nanochannels from Silica Nanowire Templates

Nanofluidic Molecular Filters for Efficient Protein Separation and Preconcentration

Organic Solvent Nanofiltration with Nanoparticles Aggregation Based on Electrostatic Interaction for Molecular Separation

Nanofluidic Devices For Rapid Continuous-Flow Bioseparation

Continuous-Flow Bioseparation Using Microfabricated Anisotropic Nanofluidic Sieving Structures

Mesoporous Silica Thin Membranes with Large Vertical Mesochannels for Nanosize-Based Separation.

High-resolution Separation of DNA/proteins Through Nanorod Sieving Matrix.

A Nanofilter Array Chip for Fast Gel-Free Biomolecule Separation.

Colloidal Lithography-Based Fabrication of Highly-Ordered Nanofluidic Channels with an Ultra-High Surface-to-volume Ratio

Fabrication of Micro/Nano-filter by building sacrificial structure with colloid crystal

Direct Fabrication of Freestanding and Patterned Nanoporous Junctions in a 3D Micro-Nanofluidic Device for Ion-Selective Transport

Ultrathin self-assembled anionic polymer membranes for superfast size-selective separation.

Nanofilms directly formed on macro-porous substrates for molecular and ionic sieving

Fabrication of Nanoporous Alumina Ultrafiltration Membrane with Tunable Pore Size Using Block Copolymer Templates

Artificial molecular sieves and filters: a new paradigm for biomolecule separation.

Interconnecting Zero-Dimensional Porous Organic Cages into Sub-8 Nm Nanofilm for Bio-Inspired Separation

2.5-Dimensional Parylene C Micropore Array with a Large Area and a High Porosity for High-Throughput Particle and Cell Separation

Micro-patternable Nanoporous Polymer Integrated with Microstructures for Molecular Filtration.

Two-Dimensional Nanofibrous Networks by Superspreading-Based Phase Inversion for High-Efficiency Separation.