Bulk AlN crystal growth by direct heating of the source using microwaves

D. Zhuang,J.H. Edgar,B. Liu,H.E. Huey,H.X. Jiang,J.Y. Lin,M. Kuball,F. Mogal,J. Chaudhuri,Z. Rek
DOI: https://doi.org/10.1016/j.jcrysgro.2003.10.080
IF: 1.8
2004-01-01
Journal of Crystal Growth
Abstract:AlN single crystal platelets up to 2×3mm2 and needles 1mm in diameter and 3mm in length were successfully grown by directly heating the source materials with microwaves. The process temperature was over 2000°C and the pressure was kept constant at 910Torr. The growth rate was typically 300μmh−1 in the c-direction. An emission around 5.5eV was observed in the photoluminescence spectrum probably caused by magnesium impurity. The dislocation density was low, 6×103cm−2, as determined by both synchrotron white beam X-ray topography and etching in molten potassium hydroxide–sodium hydroxide eutectic alloy. Etching produced hexagonal pits and hexagonal hillocks on the Al- and N-polar surfaces, respectively. Raman spectra, X-ray topograph, and etch pit densities demonstrate that the crystals have good structural quality.
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