Gamma-Ray Radiation and Annealing Effects on Colour Cmos Image Sensors

XT Meng,AG Kang,XY Wang,Z You
DOI: https://doi.org/10.1088/0268-1242/18/1/101
IF: 2.048
2002-01-01
Semiconductor Science and Technology
Abstract:For colour CMOS digital image sensors irradiated with different γ-ray doses, the average brightness and non-uniformity of the dark output images increase noticeably above 0.6 kGy. Some light regions appear on the images, their brightness and area becoming greater with increasing γ-ray dosage. The whole region becomes bright at 1.6–1.8 kGy. The light region has different positions at different doses, showing that the non-uniformity exists due to an unstable fabrication process. For sensors maintained at room temperature for 7 days after irradiation, the brightness and area of these regions increase, as well as the average brightness and non-uniformity. An explanation for the changes of the characteristic parameters is presented.
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