Study of Environmental Effect on Precise Position in Micromanufacture

Bo ZHANG,Hong XUE

DOI: https://doi.org/10.3969/j.issn.1003-5451.2007.05.002

2007-01-01

Abstract:Evaluation the factors effected on the dualchanel laser interferometer precise measurement in micromanufacture, emphasizing on the measured value changed with the atmosphere pressure, temperature, humidity, which would greatly work on the results of the micromanufature.

What problem does this paper attempt to address?

Study of Environmental Effects on Precise Position in Micro-and Nano-manufacture

ZHANG Bo,XUE Hong

2007-01-01

Abstract:The influences of the environmental factors on the precise-position during micro-and nano-manufacture were studied by citing applications of the dual-frequency laser interferometer in the Electron Beam Lithography System in precise position as instances.Because temperature is the most important factor,a real-time temperature compensation method is proposed to correct the position error resulting from thermal expansion.
Study on the Control of Micro-Environmental Parameters in Long Distance Laser Interferometry

Yan He,Yurong Zhu,Hongfei Nie

DOI: https://doi.org/10.1088/1742-6596/2002/1/012055

2021-08-01

Journal of Physics: Conference Series

Abstract:Abstract Fluctuation in environmental parameters has become an important factor affecting the performance of ultra precision measurement. Aiming at the long-distance and high-speed laser interferometer measurement system, a method combining structure design and closed-loop control is proposed to reduce the measurement error caused by environmental parameters. The uniform pressure structure is designed, and the control system of micro environmental parameters is established. The simulation and experimental research on the uniformity of temperature and pressure on the optical path measured by laser interferometer are carried out. The simulation and experimental results show that this method can achieve temperature uniformity and stability above 0.01°C and pressure uniformity and stability above 1Pa, and can be widely used in micro environment parameter control of long-distance ultra precision measurement.
A Novel Method for Analyzing the Influence of Relative Attitude of Laser Profile Scanner on 3D Measurement System

Wenxu Luo,Yipeng Tang,Cijun Yu,Qing Wang,Yinglin Ke

DOI: https://doi.org/10.1016/j.measurement.2024.114664

IF: 5.6

2024-01-01

Measurement

Abstract:Scanning measurement systems are a pivotal solution to enable the rapid collection of 3D data from physical entities and provide further information for quality control. However, some external factors besides the scanner itself can also influence the measurement accuracy of the scanning system. In this paper, we propose a framework for analyzing the relative attitude influence of scanners on measurement uncertainty in the X and Z directions, respectively, containing the measured uncertainty calculation by the proposed optimal edge points detection and plane segmentation algorithm and the measurement uncertainty prediction model by machine learning. Experiments demonstrate that the distribution feature of measurement uncertainty differs in the X and Z directions and can provide predictions of the measurement uncertainty with about 0.2 % averaged MRE value. Our analysis advances the understanding of measurement uncertainty of scanning systems in different directions while it can be further applied to refine the calibration and measurement process.
Anti Light Disturbance Analysis of the Measurement of High Precision micro Displacement

Shuqi LOU,Jian BAI,Qianbo LU,Wenxiu LIAN,Xufen JIAO

DOI: https://doi.org/10.3969/j.issn.1003-501X.2015.11.007

2015-01-01

Abstract:Micro displacement measuring device with high precision based on the principle of grating interference has high voltage sensitivity, thus weak jitter can cause irreparable impact on measuring results. These jitters include the air jitter, the ground vibration, and the fluctuation of the light source, etc. It becomes crucial for how to restrain the influence of outside jitter on the measurements of micro displacement effectively. Firstly, a series of experiments and analyses was carried on for the power fluctuation of the linearly polarized He-Ne laser, which drew that the power fluctuation range of light was greater than 7% which exceeded the fluctuation limit of 1%. Then, using the compensation measures of two signal acquisition and scaling operation, anti light disturbance came true. The analysis of experimental data shows that the effect of light source fluctuation on output voltage can be suppressed effectively through the compensation of optical path and scaling operation. The final amplitude of fluctuation of the output voltage is reduced by 60% than the initial state, and the displacement measurement error reduced from 1.95×10-7m to 1.40×10-8m.
Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Xiang Hengfu,Fu Jianzhong

2009-01-01

Abstract:Laser direct-writing manufacturing polymer microfluidic chip is a new micromachining technology.In order to study the relationship between laser processing parameters and microchannel depth,experimental research on CO2 laser micromachining PMMA microchannel was carried out through a precision experimental table.The relationship among laser power,scanning velocity and machining passes and microchannel depth was obtained,and the interrelationship among microchannel length,microchannel depth and microchannel width was also studied.The experimental results indicates that the difference between the theoretical data and the experimental data is only about 6 μm when the laser power is 15 W-35 W and the scanning velocity is 0.2 m/s~0.45 m/s.
Research on Transmission Performance of a Surface Acoustic Wave Sensing System Used in Manufacturing Environment Monitoring

Cong-cong Luan,Xin-hua Yao,Qiu-yue Chen,Jian-zhong Fu

DOI: https://doi.org/10.1631/jzus.a1600259

2017-01-01

Journal of Zhejiang University SCIENCE A

Abstract:Surface acoustic wave (SAW) sensors show great promise in monitoring fast-rotating or moving machinery in manufacturing environments, and have several advantages in the measurement of temperature, torque, pressure, and strain because of their passive and wireless capability. However, very few studies have systematically attempted to evaluate the characteristics of SAW sensors in a metal environment and rotating structures, both of which are common in machine tools. Simulation of the influence of the metal using CST software and a series of experiments with an SAW temperature sensor in real environments were designed to investigate the factors that affect transmission performance, including antenna angles, orientations, rotation speeds, and a metallic plate, along with the interrogator antenna–SAW sensor antenna separation distance. Our experimental measurements show that the sensor’s optimal placement in manufacturing environments should take into account all these factors in order to maintain system measurement and data transmission capability. As the first attempt to systematically investigate the transmission characteristics of the SAW sensor used in manufacturing environment, this study aims to guide users of SAW sensor applications and encourage more research in the field of wireless passive SAW sensors in monitoring applications.
Analysis of the Effects on Ultra-Short Laser Pulse Beam Quality Caused by Errors in Optical Systems

Shang Hong-bo,Cen Zhao-feng,Li Xiao-tong,Liu Qiang-sheng,Hu Wei

DOI: https://doi.org/10.1117/12.866868

2010-01-01

Abstract:The quality of the ultra-short laser pulse need to be controlled in applications. In this paper, the effects on ultra-short laser pulse beam quality caused by surface errors and assembly errors in real optical systems is analyzed in a microscope objective system. Zernike polynomials are used to describe the surface errors and error limit is set for the tilt and decenter in assembly. When coming to calculations, we firstly take samples from the incident laser pulse and decompose it into different frequency components; then we use ray-tracing combing with diffraction integral from the exit pupil to the focal plane for calculation. According to the result of the calculation and analysis, we can reasonably control the surface errors and assembly errors in the microscope object system.
Study on technology of zinc oxide piezoelectric thin film device with surface micromachining substrate

Zhonghe Jin,Xiaoming Chen,Yingyin Zou

1994-01-01

Abstract:The zinc oxide piezoelectric thin film device with surface micromachining substrate has multifunction which can realize minimization and integration. The surface micromachining technique and the effect of the manufacturing process of this device on the substrate were studied so that the deformation of such structure can be prevented. The C-axis oriented zinc oxide thin film was prepared by using magnetron sputtering on a polysilicon membrane, from which the relations among the growth quality, sputtering power, gas pressure and substrate temeprature were discussed for determining the optimum technology of the thin film.
Analysis of Optical Measurement Precision Limit for Close-to-atomic Scale Manufacturing

Zhan Hai-Yang,Xing Fei,Zhang Li

DOI: https://doi.org/10.7498/aps.70.20201924

IF: 0.906

2021-01-01

Acta Physica Sinica

Abstract:Measurement technology with nanometer scale or higher level precision is the basis and guarantee for developing atomic and close-to-atomic scale manufacturing. Optical measurement has the advantages of high precision, wide range and real-time measurement. The precision of localizing a single imaging spot’s center is not limited by the diffraction limit and could reach nanometer scale. However, the shot noise of light and the dark current noise of the detector bring about a precision limit for optical measurement. Based on the Cramer-Rao lower bound theory, a precision limit estimation method for general imaging profiles is developed in this paper. Taking the typical Airy spot for example, the influences of the parameters such as signal-to-noise ratio, energy concentration and processing method on the positioning precision limit are analyzed, and suggestions and conclusions for improving the measurement precision are given. The precision limit of a laboratory imaging spot is calculated, which verifies that the conclusions are also suitable for the imaging profiles similar to the Airy spot. The research provides the analytical method and theoretical guidance for the application and optimization of optical measurement in atomic and close-to-atomic scale manufacturing.
Modeling and Analysis of Uncertainty in On-Machine Form Characterization of Diamond-Machined Optical Micro-Structured Surfaces

Wu-Le Zhu,Zhiwei Zhu,Mingjun Ren,Kornel F. Ehmann,Bing-Feng Ju

DOI: https://doi.org/10.1088/0957-0233/27/12/125017

2016-01-01

Abstract:Ultra-precision diamond machining is widely used in the manufacture of optical micro-structured surfaces with sub-micron form accuracy. As optical performance is highly-dependent on surface form accuracy, it is critically important to use reliable form characterization methods for surface quality control. To ascertain the characteristics of real machined surfaces, a reliable on-machine spiral scanning approach with high fidelity is presented in this paper. However, since many uncertainty contributors that lead to significant variations in the characterization results are unavoidable, an error analysis model is developed to identify the associated uncertainties to facilitate the reliable quantification of the demanding specifications of the manufactured surfaces. To accomplish this, both the diamond machining process and the on-machine spiral scanning procedure are investigated. Through the proposed model, via the Monte Carlo method, the estimation of form error parameters of a compound eye lens array is conducted in correlation with form deviations, scanning centering errors, measurement drift and noise, etc. Application experiments, using an on-machine scanning tunneling microscope, verify the proposed model and also confirm its potential superiority over the conventional off-machine raster scanning method for surface characterization and quality control.
Primary Environment Influence Factors to Tracking Precision in Space-ground Laser Communication

韩成,白宝兴,杨华民,佟首峰,范静涛,于林韬,朱一峰

DOI: https://doi.org/10.3788/gzxb20103901.0089

2010-01-01

Abstract:In order to analyze influence of the external factors to the tracking precision of space-ground optical communication,the platform vibration,atmospheric turbulence,and background light are studied, and can be attributed to the influence of tracking precision.Tracking simulation system is founded on the basis of measured platform vibration data.The compositive influence of various factors to tracking precision is analyzed under different conditions.Based on the assumptions,coarse tracking can well suppress the vibration of mobile platform on ground and ensure that laser beam can enter fine tracking field;the middle atmospheric turbulence increases the standard deviation of fine tracking error to about four times;if low altitude area is selected as examination spot,atmospheric turbulence will increase standard deviation of fine tracking error to about two times.
Experimental Study on Temperature Characteristic of Micro Machine Accelerometer

翁彦雯,董景新,刘云峰

DOI: https://doi.org/10.3969/j.issn.1003-5451.2004.04.012

2004-01-01

Abstract:The development of ultraprecision machining technique is promoted by the requirements of defense weapon equipment system.Focusing on character of advanced weapon equipment system, the applications of ultraprecision machining technique on this respect are described. Based on this, the development trend and important subjects for studying ultraprecision machining technique recentlyin China are presented.
Experimental Study on the Measurement of Micro Structures

QX Li,YH Li,BX Wang,SF Xue

DOI: https://doi.org/10.1117/1.1795261

IF: 1.3

2004-01-01

Optical Engineering

Abstract:Measurement of micro structures is a key issue in microtechnology, and it will influence the production efficiency and quality of large-scale integrated circuits. An experimental study on the factors affecting the accuracy of measurement of micro structures has been carried out with a laboratory-built DXY-1 type linewidth measuring system. The experiment results show that the repeatability of the system is better than ±0.005 µm, and the difference between the nominal and measured values is less than ±0.02 µm.
A Position and Attitude Measurement Method Based on Laser Displacement Sensor and Infrared Vision Camera

Zhenxing Li,Yongchen Pei,Chuan Qu,Fan Yang

DOI: https://doi.org/10.1109/tim.2022.3181902

IF: 5.6

2022-06-21

IEEE Transactions on Instrumentation and Measurement

Abstract:The position and attitude measurement of objects plays an important role in industrial manufacture and inspection. However, in the existing measurement methods, the challenges brought by the environmental uncertainty to the visual measurement algorithm and the coordinate conversion errors caused by the joint measurement of various precision equipment will lead to poor accuracy and stability. In this article, a measurement method is proposed to measure the object's position and attitude based on laser displacement sensor and infrared vision camera. First, when measuring the position and attitude, the combination of infrared vision camera and measurement target is an effective method to solve the challenges brought by environmental changes and measurement target changes in visual measurement methods. In addition, the measurement results and data of the whole system need not be converted between multiple coordinate systems, which avoid the complexity of system calculation and coordinate conversion errors. Through position and attitude measuring experiments, the position measurement error is 2.6 mm and the attitude angle measurement error is 1.1°, which verifies the feasibility and stability of the method.

engineering, electrical & electronic,instruments & instrumentation
Experimental and Numerical Investigation on Humidity Distribution in an Environmental Chamber

Liang PU,Yanzhong LI,Yinhai ZHU,Changyong GAO

DOI: https://doi.org/10.1299/jee.4.326

2009-01-01

Journal of Environment and Engineering

Abstract:Environmental chamber is widely used for testing the performance of the equipment with all kinds of natural ambient parameters. In this study, water droplet generated from ultrasonic humidifier is ascertained by laser diffraction measurement technology. The accurate droplet size and distribution is offered to CFD simulation as the initial condition. Humidity distribution with different initial conditions is studied by both experiment and CFD simulation. Comparisons show that the proposed CFD method can provide reliable results in simulation on the humidity distribution. The numerical and experimental results indicate that as the increase of inlet temperature, fluctuation of relative humidity (RH) at each point decrease with the time. Under the inlet condition with low-humidity, the deviation of average RH is decrease with inlet temperature. On the other hand, under the high-humidity condition, the difference of average RH is getting larger with the increase of inlet temperature. Compared with the mean value, the fluctuation of the humidity is big but the RH at measuring points is close to the inlet RH value under the inlet condition with low humidity.
REAL-TIME MEASUREMENT OF MACHINE TOOL TEMPERATURE FIELDS AND THEIR EFFECT ON MACHINING ERRORS

C. Chen,J. F. Zhang,Z. J. Wu,P. F. Feng

DOI: https://doi.org/10.5755/j01.mech.17.4.572

2011-01-01

Mechanika

Abstract:This paper presents a method and apparatus to carry out realtime measurement of temperature fields and thermal origin machining errors in machine tools. Experiments are performed on a vertical machining center, and the experimental data are analyzed in the data processing system. Displacements and temperatures are measured during machine tool operation. Platinum resistance sensors are used to collect the temperature changes. High accuracy laser displacement sensors and an eddy current displacement sensor are used to measure the thermal origin errors in the positioning of the machine spindle in the X-, Y- and Z-axes. To get more accurate experimental data, a rolling-mean filter is introduced in the signal processing to eliminate the geometric form error induced by spindle radial runout, angular swing and axial shifting. The results show that the measurement system and testing method is highly efficient and precise. http://dx.doi.org/10.5755/j01.mech.17.4.572
A Novel Methodology for Measuring Ambient Thermal Effects on Machine Tools

Fernando Egaña,Unai Mutilba,José A Yagüe-Fabra,Eneko Gomez-Acedo

DOI: https://doi.org/10.3390/s24072380

2024-04-08

Abstract:Large machine tools are critically affected by ambient temperature fluctuations, impacting their performance and the quality of machined products. Addressing the challenge of accurately measuring thermal effects on machine structures, this study introduces the Machine Tool Integrated Inverse Multilateration method. This method offers a precise approach for assessing geometric error parameters throughout a machine's working volume, featuring a low level of uncertainty and high speed suitable for effective temperature change monitoring. A significant innovation is found in the capability to automatically realise the volumetric error characterisation of medium- to large-sized machine tools at intervals of 40-60 min with a measurement uncertainty of 10 µm. This enables the detailed study of thermal errors which are generated due to variations in ambient temperature over extended periods. To validate the method, an extensive experimental campaign was conducted on a ZAYER Arion G™ large machine tool using a LEICA AT960™ laser tracker with four wide-angle retro-reflectors under natural workshop conditions. This research identified two key thermal scenarios, quasi-stationary and changing environments, providing valuable insights into how temperature variations influence machine behaviour. This novel method facilitates the optimization of machine tool operations and the improvement of product quality in industrial environments, marking a significant advancement in manufacturing metrology.
Application of the precision industrial measurement technology in geometric measurement

Chang’an Hu,Wanze Li,Yang Zhou,Wenbo Du,Yuanhui Peng,Jiangang Li

DOI: https://doi.org/10.1088/1742-6596/1885/2/022021

2021-04-01

Journal of Physics: Conference Series

Abstract:Abstract In recent years, for expanding the productivity and improving the market competitiveness, some methods are carried out, which include new technology, new process, new materials and so on, to constantly improve the precision of geometric measurement in the manufacturing field. In addition to this, a large number of the advanced manufacturing equipment has also been used. In the case of rich field experience, this paper mainly introduces the application of laser tracker, laser interferometer, joint arm type coordinate measuring machine, three-dimensional contour optical scanning measuring instrument in robot, automobile fixture, ground penetrating radar, special-shaped parts scanning and so on.
Interferometer environmental error compensation based on refractive index's spatio-temporal coupling model

Zhenyu Gao,Ming Zhang,Jinchun Hu,Yu Zhu,Guanghong Duan

DOI: https://doi.org/10.4028/www.scientific.net/AMR.219-220.670

2011-01-01

Abstract:By analyzing the length measurement principle of interferometer, the key of environmental error compensation of interferometer is modeling the refractive index distribution along the measurement optical path. The spatio-temporal coupling models of temperature, pressure and humidity were established through the collected data by sensors, using the block pulse operator method. Then the model of refractive index over time along the optical path was obtained by Edlen's formulation, and the environmental error compensation was achieved. The simulation results of lithography mask stage's movement environmental flow and measurement showed that this method can compensate interferometer environmental error well, and the following residual error was reduced to less than 1nm so that the resolution level was achieved.
Research on the Influence of Air Pressure to High Accuracy Mass Measurement

Chang-Qing Cai,Man-Hong Hu,Jian Wang,Yue Zhang,Tao Huang,Rui-Lin Zhong,Kai Jiao

DOI: https://doi.org/10.2991/mme-16.2017.64

2017-01-01

Abstract:This paper analyses the influence of air pressure regarding the precise mass measuring process. The stability of air pressure to the mass determination process is discussed experimentally using the new M-one mass comparator. Due to the change of air pressure, air flow and vibration with regard to the weighing hanger can be arisen. The vibration of weighing hanger is from both the base and the air flow. Under air pressure control, the standard deviation of weighing process can be reduced to 0.39 mu g.

Study of Environmental Effect on Precise Position in Micromanufacture

Study of Environmental Effects on Precise Position in Micro-and Nano-manufacture

Study on the Control of Micro-Environmental Parameters in Long Distance Laser Interferometry

A Novel Method for Analyzing the Influence of Relative Attitude of Laser Profile Scanner on 3D Measurement System

Anti Light Disturbance Analysis of the Measurement of High Precision micro Displacement

Experimental Research on CO_2 Laser Direct-writing Machining PMMA Microchannel

Research on Transmission Performance of a Surface Acoustic Wave Sensing System Used in Manufacturing Environment Monitoring

Analysis of the Effects on Ultra-Short Laser Pulse Beam Quality Caused by Errors in Optical Systems

Study on technology of zinc oxide piezoelectric thin film device with surface micromachining substrate

Analysis of Optical Measurement Precision Limit for Close-to-atomic Scale Manufacturing

Modeling and Analysis of Uncertainty in On-Machine Form Characterization of Diamond-Machined Optical Micro-Structured Surfaces

Primary Environment Influence Factors to Tracking Precision in Space-ground Laser Communication

Experimental Study on Temperature Characteristic of Micro Machine Accelerometer

Experimental Study on the Measurement of Micro Structures

A Position and Attitude Measurement Method Based on Laser Displacement Sensor and Infrared Vision Camera

Experimental and Numerical Investigation on Humidity Distribution in an Environmental Chamber

REAL-TIME MEASUREMENT OF MACHINE TOOL TEMPERATURE FIELDS AND THEIR EFFECT ON MACHINING ERRORS

A Novel Methodology for Measuring Ambient Thermal Effects on Machine Tools

Application of the precision industrial measurement technology in geometric measurement

Interferometer environmental error compensation based on refractive index's spatio-temporal coupling model

Research on the Influence of Air Pressure to High Accuracy Mass Measurement