X-Ray Scattering Technologies of Microstructure Analysis of Thin Films

吴小山
DOI: https://doi.org/10.3969/j.issn.1673-2340.2008.03.001
2008-01-01
Abstract:Principles and technologies of small angle reflection,diffuse scattering and diffraction of X-rays,and small angle diffraction of polycrystal thin films are introduced.The requirements for data collection in various experimental technologies are specifically described.A few studies on spin valve,strain of isomerism,and depth contour of thin films,illustrate the applications of the scattering technologies in research of thin films.
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