Structure and Magnetic Properties of NiZn Films Fabricated by Alternative Sputtering Technique

Hai-bo WANG,Jian-rong SUN,Lan-xi WANG,Fu-lin WEI,Li WANG,Jian-bo WANG,Fa-shen LI,Bao-long SHEN
DOI: https://doi.org/10.3969/j.issn.1001-5132.2010.01.024
2010-01-01
Abstract:NiZn ferrite thin films are prepared by alternative sputtering technique from two targets with the composition of NiFe2O4 and ZnFe2O4.The fabricating conditions on the performance of the films are studied to improve the saturation magnetization and reduce the coercivity of the films,making the films suitable to the applications of high-frequency film devices.The as-deposited films are characterized with spinel structure.In this paper,the optimal fabricating conditions are achieved through a variety of trial tests designated to observe how the magnetic properties of NiZn ferrite films change.
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