Research on the Failure Emitter of Hollow Cathode by FESEM

Shi Kai,Wang Zhi,Sun Jingchun,Liu Menglin,Han Zhenghe
2008-01-01
Abstract:Surface morphology and composition analysis of the failure emitter of hollow cathode were charac- terized by using FESEM and EDS.The influence of environment parameters such as preheating temperatures, composition of circumstance gas on the failure of the emitter of the hollow cathode was investigated.In the Ion Beam Assisted Deposition system,the life of the hollow cathode was influenced by preheating temperature,cir- cumstance gas and so on.The life of the emitter of the hollow cathode can be advanced by control of the tempera- ture and the decrease of the time the oxygen participated in the reaction process.
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