Progress in Nitride-based LEDs on Silicon Substrates

LI Guoqiang,YANG Hui
2012-01-01
Abstract:The technical states of nitride-based light-emitting diodes(LEDs) grown on three major substrates of sapphire,SiC and Si are reviewed comparatively,and recent developments of LEDs on Si substrates and some new fabrication techniques are presented,including those aiming to improve the doping quality of nitride film such as buffer layer,patterned substrate,laser lift off,and AAO,and those for enhancing light extraction efficiency of LEDs such as mirror structure and multiple quantum wells/quantum dots.These new technologies combining with traditional MOCVD,HVPE,and MBE methods can help to overcome the main disadvantages of Si substrates for LEDs.
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