Preparation and Tribological Properties Research of DLC Film on the Surface of Si_3N_4 Ceramics

Jing Cuini,Gu Le,Zhang Chuanwei,Tang Guangze,Wang Liqin
DOI: https://doi.org/10.3969/j.issn.0254-0150.2010.09.005
2010-01-01
Abstract:Based on the plasma based ion implantation and deposition technology,diamond like carbon films about 200 to 400 nm thickness on the surface of Si3N4 ceramic disks were prepared.The properties of the film were tested,such as film thickness,surface topography,structure,cohesion between film and substrate material.The tribological properties were investigated on ball-on-disk wear tester.Results show that the DLC films are well-distributed,which have lower friction coefficient and good abrasion resistance;the hardness and elasticity modulus of film are almost the same with the basal body,the cohesion between film and substrate material is good.
What problem does this paper attempt to address?