Study on Curing Control and Focal Spot Measurement of Aspherical Liquid Microlens

詹珍贤 Zhan Zhenxian,王克逸 Wang Keyi,姚海涛 Yao Haitao,丁志中 Ding Zhizhong
DOI: https://doi.org/10.3788/AOS20092911.3212
2009-01-01
Acta Optica Sinica
Abstract:Aspherical liquid microlens of ultra-violet(UV) curable polymer was fabricated by using electrostatic field and real-time measurement.It was investigated that the surface profile and focal spot of the aspherical liquid lens had distortions while UV curing.The surface profiles and the focal spots before and after curing were compared.The reasons why distortion happened,its influence on lens′s optical quality and how it can be solved were all discussed.Spot probe scanning microscope with 50 nm resolution was employed to accurately measure the focal spots of the aspherical microlens.The spots at different axis positions and focal spot with 0.384 μm diameter were achieved.The point spread function and optical transfer function of the aspherical microlens were calculated,and the actual imaging photographs were provided.So the imaging ability of the aspherical microlens can be evaluated and it′s important for perfecting the lens fabricating technology.
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