Abstract:The double-ended excitation self-balancing bridge excitation method is a capacitance measurement method with rather a high measurement accuracy currently. However, the reference impedance of the electric bridge limits the traditional self-balancing excitation measurement method, making it difficult to achieve high accuracy and a wide range of capacitance sensor measurements. In the proposed paper, frequency adjustment method is introduced to enable impedance matching between the measured capacitance and the reference resistance. The measurement range is broadened as well as maintaining the accuracy of the capacitance measurement. The measurement circuit is composed of a reference resistor, a bridge in series with the measured capacitance and an operational amplifier follower circuit. First, we roughly measure the input impedance of the operational amplifier and the capacitive reactance of the capacitance under test using a two-step excitation method. Then, the best excitation frequency is calculated to match the reference resistor according to the capacitive reactance under test, and the input impedance of the operational amplifier is re-estimated with the best frequency. Finally, we complete the accurate measurement of the capacitive reactance under test through the use of dual excitation. The experimental results demonstrate the method's high accuracy measurement within the range of 1.6pF to 16nF, with the reference resistance set at 1MΩ and the excitation frequency adjusted between 10-100kHz. Additionally, dual excitation stability testing verifies relative standard deviations in the range of 0.01% to 0.12%. Experiments on filter capsule sensing detection show that the proposed frequency adjustment measurement method can perform highly sensitive capacitive sensing measurements under the influence of parasitic effects.

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