Abstract:High accuracy radio-frequency (RF) measurements typically require a calibration to remove the undesired effects of the measurement apparatus. The calibration consists of measuring some combination of known standards such as short, open, load, through, and delay. When measurements are performed on-wafer for silicon RF integrated circuits (RFICs), a two-step calibration/de-embedding technique is typically used. First, the measurement system is calibrated to a reference plane located at the probe tips through measurement of calibration standards fabricated on an impedance-standard substrate. Second, on-wafer de-embedding standards are measured in an attempt to shift the reference plane to the terminals of the device under test (DUT). While significant effort has gone into the development of improved on-wafer de-embedding schemes, discrepancies between actual and de-embedded data still exist. In this article, we first discuss a specific case (a spiral inductor on silicon) for which there was a significant discrepancy between measurement and analysis. The problem is found to be with the measurement. This problem is detailed, and a technique we call "synthetic calibration" is described that can be used with any electromagnetic (EM) analysis to quantify calibration error for any proposed set of calibration standards. Due to the high expense and time required for wafer fabrication, it is important to successfully complete such a calibration validation prior to tape-out.

A Novel Four-Port Calibration Method for High Frequency On-Wafer S-parameter Measurement

A Novel Four-Port Symmetric Probe Calibration Method for On-Wafer S-Parameter Measurement

MMIC on-Wafer Test Method Based on Hybrid Balanced and Unbalanced RF Pad Structures

Four-Port SOLR Calibration Algorithm for Symmetric GSSG Probes

A New Capacitance-to-Frequency Converter for On-Chip Capacitance Measurement and Calibration in CMOS Technology

2-Port GSG Probe Calibration Using TRL and 16-Term Error Model Up to 100Ghz

An Ultrawideband Asymmetric Calibration Method for a Simultaneously Electromagnetic Near-Field Probing System

Research on Calibration Method of On-wafer Power

A New Calibration Technique of Electromagnetic Simulators for Accurate Analyses of Microwave Components on Epitaxial Wafers

A New SOLT Calibration Method for Leaky On-Wafer Measurements Using a 10-Term Error Model

A potentially significant on-wafer high-frequency measurement calibration error

Measurement Error Detection for Calibration Standards Based on Cluster Analysis

Comparison of On-Wafer TRL Calibration to ISS SOLT Calibration With Open-Short De-Embedding up to 500 GHz

Design of Microstrip Line used for Probe Calibration up to 40 GHz

A calibration method for vector network analyzers using a line and three or more offset-reflect standards

Design of a Waveguide Calibration Kit Consisting of Offset Shorts for Low Measurement Uncertainty

Sensitivity and Uncertainty Analysis of Nonideal Calibration Standards for 16-Term Error Model

Parasitic Parameter Extraction for Calibration Standards Using an Optimization Strategy

Design of High-Frequency Differential Line for Ex Probe Calibration