Measurement combination of x- and y-axis accelerations and z-axis angular velocity in a slot-structure resonator

Shichang Hu,Huijie Zhu,Mingjun Ma,Yidong Liu,Zhonghe Jin

2013-01-01

Nanotechnology and Precision Engineering

Abstract:A slot-structure resonator comprised of two orthogonal accelerometers is presented. The device can detect the x- and y-axis accelerations and the z-axis angular velocity at the same time. Variable-area sensing is adopted because of its good linearity and quick response. The resonant frequencies of the x-and y-axis accelerometers are 1.9315 kHz and 1.8403 kHz, respectively. The x-axis accelerometer is driven into resonance. The y-axis accelerometer moves together with the x-axis accelerometer and oscillates along the y-axis due to z-axis angular velocity. The equilibrium positions of the accelerometers change with the corresponding x- and y-axis accelerations. The test results show that the sensitivity of the z-axis angular velocity is 16 mV/((°)·s-1), and those of the x- and y-axis accelerations are 49 mV/g and 244 mV/g, respectively. The noise of the angular velocity output is 0.0138°/(s·√Hz-1) for the z-axis accelerometer, and those of the acceleration velocity output are 0.42 × 10-3 g/√Hz and 0.074 × 10-3 g/√Hz for the x- and y-axis accelerometers, respectively.