Abstract:To date, optical lithography has been extensively used for in situ patterning of hydrogel structures in a scale range from hundreds of microns to a few millimeters. The two main limitations which prevent smaller feature sizes of hydrogel structures are (1) the upper glass layer of a microchip maintains a large spacing (typically 525 μm) between the photomask and hydrogel precursor, leading to diffraction of UV light at the edges of mask patterns, (2) diffusion of free radicals and monomers results in irregular polymerization near the illumination interface. In this work, we present a simple approach to enable the use of optical lithography to fabricate hydrogel arrays with a minimum feature size of 4 μm inside closed microchips. To achieve this, we combined two different techniques. First, the upper glass layer of the microchip was thinned by mechanical polishing to reduce the spacing between the photomask and hydrogel precursor, and thereby the diffraction of UV light at the edges of mask patterns. The polishing process reduces the upper layer thickness from ∼525 to ∼100 μm, and the mean surface roughness from 20 to 3 nm. Second, we developed an intermittent illumination technique consisting of short illumination periods followed by relatively longer dark periods, which decrease the diffusion of monomers. Combination of these two methods allows for fabrication of 0.4 × 10(6) sub-10 μm sized hydrogel patterns over large areas (cm(2)) with high reproducibility (∼98.5% patterning success). The patterning method is tested with two different types of photopolymerizing hydrogels: polyacrylamide and polyethylene glycol diacrylate. This method enables in situ fabrication of well-defined hydrogel patterns and presents a simple approach to fabricate 3-D hydrogel matrices for biomolecule separation, biosensing, tissue engineering, and immobilized protein microarray applications.

Periodic Micropatterning of Polyethylene Glycol Diacrylate Hydrogel by Laser Interference Lithography Using Nano‐ and Femtosecond Pulsed Lasers

The Fabrication Of Nanostructures On Polydimethylsiloxane By Laser Interference Lithography

Microlens Arrays Fabricated on Polycarbonate Sheets Via Pulsed Laser Maskless Interference Patterning

Self-focusing 3D lithography with varying refractive index polyethylene glycol diacrylate

Induced Periodic Structures In Bulk Polymers By Interference Of Laser Beams

Photopatterning of Hydrogel Microarrays in Closed Microchips

Three-Dimensional Direct Laser Writing of PEGda Hydrogel Microstructures with Low Threshold Power Using a Green Laser Beam

Generation of Periodic Micro- and Nano-Structures by Parameter-Controlled Three-Beam Laser Interference Technique

Micropatterning Microlens Arrays Fabricated by A Femtosecond Laser Wet Etch Process

Periodic Microstructures Fabricated by Laser Interference with Subsequent Etching

Picosecond Laser Interference Patterning of Periodical Micro-Architectures on Metallic Molds for Hot Embossing

Mechanism for self-formation of periodic structures on a plastic polymer surface using a nanosecond and femtosecond laser pulses

Photofabrication of Periodic Microstructures in Azodye-Doped Polymers by Interference of Laser Beams

In situ Laser-assisted Micrnmachining of Environmentally-responsive Hydrogel Films

Fabrication of microstructures by picosecond laser

Ultrafast Large Area Micropattern Generation in Non-absorbing Polymer Thin-Films by Pulsed Laser Diffraction

Formation of Periodical Sub-Micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses

Self‐Aligned Laser‐Induced Periodic Surface Structures for Large‐Area Controllable Nanopatterning

Fabrication of micropatterns of nanoarrays on a polymeric gel surface.

A thermoresponsive hydrogel poly(<i>N</i>-isopropylacrylamide) micropatterning method using microfluidic techniques

Fabrication of Micropatterned Dipeptide Hydrogels by Acoustic Trapping of Stimulus-Responsive Coacervate Droplets.