Formation of Metastable Carbide and Fractal Structure in Co Thin Films by Carbon Ion Implantation

BX LIU,K TAO
DOI: https://doi.org/10.1016/0168-583x(93)96135-y
1993-01-01
Abstract:Cobalt metal films were implanted by 50 keV carbon ions at room temperature at doses ranging from 1×1017 to 9×1017 C/cm2. A metastable hexagonal Co3−2C phase was formed in those films implanted to doses from 2.5 to 5×1017 C/cm2, which is similar to Fe3C and Ni3C, yet different from the equilibrium orthorhombic Co3C phase. More interestingly, many fractals of diffusion-limited-aggregation(DLA)-like structure were observed in some implanted films. The fractals were identified to be composed of CoC amorphous and hexagonal Co-carbide phases and had a correlation dimension of 1.82. Computer simulation was conducted by taking into account the differences between the ion induced fractals and the DLA model generated ones. The simulation results were in agreement with the observations.
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