Abstract:Accurate mechanical properties measurements in the micro scale are very important for the design and the fail-safe analysis of MEMS. And the tensile test, as one of the micromechanical experimental techniques, has the advantage of uniform stress and strain fields. In this paper, a new tensile testing structure is presented to solve the non-axial alignment problem in microscale tensile test. The testing structure integrates the specimen and the suspended spring beams on a chip. The function of the additional spring beams is to balance the non-axial loading component and so the specimen is uniaxial tensile. As the spring constant of the tensile specimen in the axial direction is much smaller than the spring constant of the testing structure in the vertical direction, the spring beams could specimen caused by non-axial force. Meanwhile, the spring constant of the specimen in axial direction is much larger than that of the spring beams in the same direction so that the loading shared in the spring beams can be ignored. The performance of the tensile testing structure is confirmed by FE simulations. When the loading force has 2° angle with the axial direction, the stress distribution of the specimen is almost identical with that of under axial loading. The axial stress of the specimen is considerably uniform. That is to say the specimen is uniaxially tensile, although the loading direction is offset the axial. And the force shared in the suspended spring beams is below 3.2% of the loading force. The tensile testing structure could greatly weaken the errors caused by disalignment, and would have big potential to be used in the microscale tensile test.

Fabrication of MEMS Springs for Micro-tensile System

Analysis, simulation and fabrication of MEMS springs for a micro-tensile system

Application of Ni/SiCw Composite Material in MEMS Microspring

RESEARCH OF MICRO-SPRINGS FORCE SENSOR FOR MICRO-TENSILE SYSTEM

Design and Fabrication of a Micro Spring with Steel Structures for the Microtensile Testing of Thin Films

Study on the Elastic Coefficient of MEMS Planar Microspring

A Micro-Tensile Method for Measuring Mechanical Properties of Mems Materials

Deformation Characteristics of MEMS Microspring under Static and Shock Loads

Integrated Uniaxial Tensile Test System for Measuring Mechanical Properties of MEMS Materials

Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS

Design and Development of Novel Electroplating Spring Frame Mems Structure Specimens for the Microtensile Testing of Thin Film Materials

Analysis of Dimension Tolerance for MEMS Ni Planar Micro Spring

Simulation and Study of Nonlinear Mechanical Properties for MEMS Ni Planar Springs

Superelastic Metal Microsprings As Fluidic Sensors and Actuators

A New Method for the Micro-Tensile Testing of Thin Film

The Design and Fabrication of 3D Micro Spring Type MEMS Probe Card

Grating-structured metallic microsprings.

Design of a Micro Tensile Testing Structure to Restrain Non-Axial Alignment Errors

A Novel Micro Tensile Testing Instrument with Replaceable Testing Specimen by Parylene Passivation Technique

Analysis and Fabrication of Torsion Micromirror Actuators Based on a MEMS Technology

An Off-chip Actuated Tensile Test Device for Microscale Mechanical Testing