Abstract:This article proposes a digital control structure for a doubly decoupled gyroscope working in the Lissajous frequency-modulated (LFM) mode based on digital phase-locked loops (PLLs), which demodulates the angular rate signal directly from the readable digital gyroscope resonance frequency, eliminating the need for specific frequency readout circuits. The resonance frequencies of the LFM gyroscope working modes contain a mode mismatch frequency modulated by input angular rate, respectively, which are tracked by two digital PLLs followed by subsequent digital demodulation and filtering. A linearized model of the digital PLL is built to analyze noise and control characteristics for different PI parameters. The impact of different amplitude–phase extraction architectures on the extracted phase signal is also addressed in this article. Contrast experiments are carried out using the same gyroscope with large internal thermal stress due to the silicon-glass bonding process and no stress relief structure around the sensing element, working in the traditional amplitude-modulated (AM) mode and the LFM mode. Overall, the LFM working mode maintains its low-temperature sensitivity and high stability in spite of the large internal thermal stress in the gyroscope compared to AM working modes. The maximum scale factor variation over the temperature range from 10 °C to 50 °C is 1000 ppm for the LFM mode compared to 51 900 ppm for the AM closed mode. The maximum zero rate output drift over the same temperature range is 0.1248 °/s for the LFM mode and 10.7139 °/s for the AM closed mode. The scale factor nonlinearity is 329 ppm with an angular rate input range of ±50 °/s for the LFM mode compared to 1902 ppm for the AM closed mode. The LFM mode zero-bias fluctuation for ten days is less than 0.12 °/s. The angle random walk (ARW) and the bias instability (BI) of the LFM gyroscope are 0.316 °/ $\surd \text{h}$ and 2 °/h, respectively.

An FPGA implementation of the LMS adaptive filter for MEMS gyroscope.

Design and Test of MEMS Gyroscope Control System Based on LMSD

Design and implementation of LMS adaptive filter algorithm based on FPGA

A Digital Control Structure for Lissajous Frequency-Modulated Mode MEMS Gyroscope

Drive Mode Control for MEMS Gyroscopes with Electrostatically Tunable Structure

Noise Analysis and Modeling for a Digital Control Architecture for Lissajous Frequency-Modulated MEMS Gyroscope with Amplitude-Modulated Readout

High Performance Interface Circuit for MEMS Gyroscope

A Fully Integrated, Full Digital Output Lissajous Frequency-Modulated MEMS Gyroscope

Identification and Suppression of Driving Force Misalignment Angle for a MEMS Gyroscope Using Parametric Excitation

A System-Level Synthetical Modeling Method for Lissajous Frequency-Modulated Mems Gyroscope

An Improved Least Mean Square Demodulator Based on Adaptive Moment Estimation Algorithm for LFM MEMS Gyroscope

An Interface ASIC for MEMS Vibratory Gyroscopes with Nonlinear Driving Control

High-Performance Digital Signal Processor for Navigation Grade Resonant Fiber Optic Gyroscope

Digital Closed-Loop Control Based on Adaptive Filter for Drive Mode of a MEMS Gyroscope

Design of Mini IMS Based on DSP

An Interface ASIC Design of MEMS Gyroscope with Analog Closed Loop Driving

Design of SoC for Special Measurement and Control of MEMS Gyroscope Based on ARM Cortex-M3

A Low-Noise High-Linearity Interface ASIC for MEMS Gyroscopes

A Digital Interface ASIC for Triple-Axis MEMS Vibratory Gyroscopes

An Interface ASIC for an Atmospheric-Pressure MEMS Gyroscope with PLL-Based Phase Adjustment and SC Amplitude Regulation

The design and implementation of interface electronics for silicon micromechanical gyroscopes