Numerical Simulation for Determining the Mechanical Properties of Thin Metal Films Using Depth-Sensing Indentation Technique

DJ Ma,KW Xu,JW He
DOI: https://doi.org/10.1016/s0040-6090(97)01054-7
IF: 2.1
1998-01-01
Thin Solid Films
Abstract:The finite element method (FEM) for elastoplastic large strain was employed to study the indentation experiment of Al film on Si substrate by a rigid spherical indenter. Two relationships between the mechanical properties of the film and the specific values of the load–displacement curve have been obtained. Using a hybrid method that involves the combination of these two relationships with nanoindentation test, the hardening index and yield strength of the metal film can be determined.
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