Monte Carlo simulation and study of thin films growing on hexagonal substrate

TAN Tian-Ya,CHEN Jun-Jie,JIANG Xue,LI Chun-Mei,SU Yu,WU Wei
DOI: https://doi.org/10.3969/j.issn.1000-0364.2009.01.031
2009-01-01
Journal of Atomic and Molecular Physics
Abstract:In this paper, the effect of coverage with film and deposition rate of incident particles on the morphology and size of an island at the early stage of thin film growing on hexagonal substrate is studied by Monte-Carlo simulation. The results show that with temperature being 300K, the morphology of islands mainly take on fractal form, and with coverage with film increasing, fractal branches of islands grow more and more large and the number of islands becomes more and more few. With deposition rate of incident particles increasing at the same temperature, facial morphology of thin film changes from distributing state of collective and handful islands to one of numerous and discrete islands. Further study shows that the effect of coverage with film and deposition rate of incident particles on diffusivity of particles results in the change of morphology of islands.
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