Preparation of high refractive index TiO_2 thin film via sol-gel process

SHENG Yong-gang,XU Yao,ZHANG Lei,LIANG Li-ping,WU Dong,SUN Yu-han,JIANG Xiao-dong,WEI Xiao-feng
2008-01-01
High Power Laser and Particle Beams
Abstract:A simple sol-gel method was applied to prepare high refractive index thin film used in antilaser optical area.The method composed of two steps employing a complete hydrolysis and a restrained polycondensation at low temperature.The morphology of the resulting sol was determined by dynamic light scattering(DLS) techniques and was characterized as anatase by high-resolution transmission electron microscopy(HRTEM).The thin optical films were deposited on K9 glass by a sol-gel spin-coating method.The film shows the presence of nanocrystalline anatase phase by X-ray diffraction(XRD) analysis.The film surface examined by atomic force microscopy(AFM) shows a mean square roughness of 7.5 nm.The transmission spectra of the film were measured using a UV-Vis-NIR spectrometer,and the refractive index,absorption coefficient of the film were calculated by ellipsometer.The refractive index of the films was about 1.91,much larger than other sol-gel films(about 1.6).The average laser induced damage threshold is 16.3 J·cm-2(3 ns pulse),close to that of amorphous sol-gel films(16.6 J·cm-2,3 ns pulse) and much larger than that of physical films(10.8 J·cm-2,3 ns pulse).
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