Micromachined Glucose Sensor and K+ ISE Based on Containment Array

JZ Zhu,JF Xie,DR Lu,GX Zhang,ZR Zhang
DOI: https://doi.org/10.1016/s0925-4005(99)00432-3
2000-01-01
Abstract:This paper reports fabrication and characterization of an integrated glucose microsensor and potassium ion selective microelectrode based on pyramidal containment array produced on silicon by anisotropic etching. The structure of containment array offers the possibility of production of multi-functional sensors.
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